Pb_(1-x)Sn_xTe闭管汽相输运过程的研究

• 作 者: 袁诗鑫 谢钦熙 司承才 于梅芳
• 机 构: 中国科学院上海技术物理研究所,中国科学院上海技术物理研究所,中国科学院上海技术物理研究所,中国科学院上海技术物理研究所
• 出 处: 半导体学报
• 发表日期: 2004年期
• 关键词: 互扩散系数 汽相 Pb x)Sn_xTe 残余气体 剩余气体 称量法 晶管 已知量 晶体表面

用称量法可以迅速地测出Pb_(1-x)Sn_xTe闭管系统中水平汽相输运速度.研究了残余气体,例如过量的碲、铅及氧与氮的剩余气体对输运速度的影响.表明升华型材料的输运过程在温差小于 30℃时,输运速度没有出现饱和情况.我们建立了升华型物质的输运速度的关系式.充入已知量的氮气,根据输运速度的数据可以算出氮与Pb_(1-x)Sn_xTe的互扩散系数为0.013cm~2/sec.

The velocity of horizontal vapor transport in Pb 1-x Sn x Te closed-tube system can be rapidly measured by the method of weighing, and the effects of residual gases such as excess tellurium, lead and the remaining gases of oxygen and nitrogen on the transport velocity The results show that the transport velocity of the sublimation material does not saturate when the temperature difference is less than 30 ° C. We establish the relationship between the transport velocity of the sublimation material and the known amount of nitrogen, The velocity data show that the interdiffusion coefficient between nitrogen and Pb_ (1-x) Sn_xTe is 0.013cm ~ 2 / sec.