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采用闭合场非平衡磁控溅射离子镀(CFUMSIP)技术在M2工具钢和Si片表面沉积CrN和CrMoN梯度涂层,利用SEM、EDS、XRD、纳米压痕仪和摩擦磨损试验仪研究了薄膜组织、成分、相结构、硬度和摩擦磨损性能。结果表明,CrMoN涂层和CrN涂层呈现出fcc结构,CrMoN涂层的表面比CrN涂层更为紧凑致密。CrMoN涂层的纳米硬度和弹性模量高于CrN涂层,CrMoN涂层的摩擦系数和磨损率均小于CrN涂层。
CrN and CrMoN gradient coatings were deposited on the surface of M2 tool steel and Si wafer by closed-field unbalanced magnetron sputter ion plating (CFUMSIP) technique. The films were characterized by SEM, EDS, XRD, nanoindentation and friction and wear tester. Tissue, composition, phase structure, hardness and friction and wear properties. The results show that the CrMoN coating and the CrN coating exhibit a fcc structure, and the surface of the CrMoN coating is more compact and dense than the CrN coating. The nano-hardness and elastic modulus of the CrMoN coating are higher than that of the CrN coating, and the friction coefficient and the wear rate of the CrMoN coating are smaller than those of the CrN coating.