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一、引言球坑仪是一种用机械方法测量固体薄膜和涂层厚度的仪器.测量的范围在0.5μ50μ之间最为合适.用这种方法测量薄膜厚度无论是透明膜或不透明膜毋须知道其薄膜的折射率或所用光波的波长,并且测得的厚度是绝对值.它既可测量光学膜亦可测量电学膜、半导体薄膜、金属膜或非金属膜的厚
I. INTRODUCTION The ball pit instrument is a kind of instrument which can measure the thickness of the solid film and the coating by the mechanical method. The measuring range is the most suitable between 0.5μ50μ. Measuring the film thickness by this method No matter it is transparent film or opaque film, The refractive index of the film or the wavelength of the light wave used, and the measured thickness is an absolute value. It measures both the optical film and the electrical film, semiconductor film, metal film or non-metal film