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实用超高真空校准装置应结构紧凑、操作简便、价格便宜.提出了一种新的设想,除采用流行的连续流压力衰减法外,介绍了两种全新结构.一是减压定压型微流量计,工作液体使用硅油,预期流量测量范围可达10~(-3)—10~(-7)帕·米~#/秒.二是小孔拓宽结构,对其可行性进行了探讨.所述结构,可根据实际需要组合成特定的超高真空校准装置.
Practical ultra-high vacuum calibration device should be compact, easy to operate, low cost. A new idea is proposed, in addition to the popular continuous flow pressure attenuation method, introduced two new structures. First, decompression constant pressure type micro Flow meter, the working fluid using silicone oil, the expected flow measurement range of up to 10 -3 (-3) -10 ~ (-7) Pa · m ~ # / sec.Second hole widen the structure, its feasibility was discussed. The structure can be combined into a specific ultra-high vacuum calibration device according to actual needs.