Capacitance Sensing and Software-Realized Lock-in Amplifier for the Electromagnetically Levitated M

• 作 者: 黄晓刚 陈文元 刘武 张卫平 吴校生
• 机 构: KeyLab.forThinFilmandMicrofabricationTechnologyofMinistryofEducation
• 出 处: 上海交通大学学报：英文版
• 发表日期: 2007年2期
• 关键词: 陀螺仪 容量感觉 惯性传感器 数字放大器 micro gyroscope capacitance sensing inertial sensor d
• 基金项目: The National Natural Science Foundation of China （No. 60402003）, The National High Technology Research and Development Program of China （ 863 Program ） （ No. 2002AA745120）

In the novel prototype of micro-gyroscope structure,the new configured capacitance sensing scheme for the micro gyroscope was analyzed and the virtual instrument based detection scheme was implemented.The digital lock-in amplifier was employed in the capa