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为了无需辅助元件就能够实现对大口径非球面的检测,将子孔径拼接技术与干涉技术相结合,提出了一种利用子孔径拼接干涉检测非球面的新方法。分析了该技术的基本原理,并基于齐次坐标变换、最小二乘拟合建立了一种综合优化的拼接模型,在此基础上初步设计和搭建了子孔径拼接干涉检测装备。利用该方法对一口径为350mm的双曲面进行了5个子孔径的拼接检测,得到拼接后的全口径面形误差的PV值为0.319λ,RMS值为0.044λ(=632.8nm)。为了对比和验证,对该非球面进行了零位补偿检测,两种方法测量所得的全口径面形分布是一致的,其PV值和RMS值的偏差分别为0.032λ和0.004λ。实验结果表明:该数学模型和拼接算法是准确可行的,从而提供了一种非零补偿测试大口径非球面的手段。
In order to realize the detection of large diameter aspheric surface without auxiliary components, a new method of detecting aspheric surface by subaperture splicing interference is proposed by combining subaperture splicing technique and interference technique. The basic principles of the technique are analyzed. Based on the homogeneous coordinate transformation and least square fitting, an integrated optimization model is established. Based on this, a preliminary design and construction of subaperture splicing interference detection equipment is proposed. By using this method, a total of five subapertures of a hyperboloid with a diameter of 350 mm were spliced. The PV of the spliced full aperture profile error was 0.319λ and the RMS value was 0.044λ (= 632.8nm). For comparison and verification, the aspheric surface was compensated for zero compensation. The full-bore profile distribution measured by the two methods was consistent, and the deviations of PV and RMS values were 0.032λ and 0.004λ, respectively. The experimental results show that the mathematical model and the stitching algorithm are accurate and feasible, which provides a non-zero compensation test method of large-diameter aspheric surface.