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采用磁控溅射工艺制备VC/TiC超晶格薄膜,并采用EDXA,XRD、HRTEM和纳米力学探针研究调制周期对超晶格薄膜的微结构和力学性能的影响。研究结果表明,当超晶格薄膜的调制周期低于临界厚度时,制备的VC/TiC超晶格薄膜能够形成共格生长结构,并获得硬度显著提高的超硬效应。然而,随着调制周期的进一步增大,超晶格薄膜的共格结构遭到破坏,导致薄膜的硬度逐渐降低,并最终趋于其组元的混合平均值。XRD结果表明,当形成共格生长结构时,超晶格薄膜内部将产生共格协调应变,从而改变不同调制层的弹性模量,这也是VC/TiC超晶格薄膜能够获得超硬效应的重要原因。
The VC / TiC superlattice films were prepared by magnetron sputtering. The effects of modulation period on the microstructure and mechanical properties of the superlattice films were investigated by EDXA, XRD, HRTEM and nano-mechanical probes. The results show that when the modulation period of the superlattice thin film is lower than the critical thickness, the prepared VC / TiC superlattice thin film can form a coherent growth structure and obtain a superhard effect with a significantly enhanced hardness. However, as the modulation period further increases, the co-lattice structure of the superlattice thin film is destroyed, resulting in a gradual decrease in the hardness of the thin film and eventually towards the mixing average of its components. XRD results show that when the coherent growth structure is formed, the coherent lattice strain will be generated in the superlattice thin film, which will change the elastic modulus of the different modulation layers, which is also important for the superhardness effect of the VC / TiC superlattice thin film the reason.