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采用电弧离子镀技术在NiTi形状记忆合金表面制备了TiN薄膜,利用X射线衍射、扫描电子显微镜、原子力显微镜、轮廓仪、纳米压痕仪和摩擦试验机表征了TiN薄膜的相成分、表面特性、厚度、硬度和膜基结合力.通过摩擦试验对比了未镀膜和镀膜NiTi合金的摩擦磨损特性.结果表明:制得的TiN薄膜均匀、致密,提高了NiTi合金的硬度;在干摩擦、0.9%NaCl溶液和Hank′s溶液润滑介质条件下,TiN薄膜均表现出良好的减摩抗磨性能,提高了NiTi合金的抗摩擦磨损特性.
The TiN thin films were prepared by arc ion plating on the surface of NiTi shape memory alloy. The phase composition, surface properties, mechanical properties and mechanical properties of TiN thin films were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy, The friction and wear properties of uncoated and coated NiTi alloy were compared by friction test.The results show that the TiN thin film prepared is uniform and compact and the hardness of NiTi alloy is improved.When the dry friction and 0.9% NaCl solution and Hank’s solution lubrication medium, TiN films showed good anti-friction and anti-friction properties, and improved the anti-friction and wear properties of NiTi alloy.