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本文回顾了真空电子器件二十年来的发展,并对今后七年薄膜与真空器件研究和生产的若干趋势作了扼要的叙述。在电子束管方面,高清晰度显像管、扁平显示管、飞点管、高分辨率等离子体监视屏等仍将继续发展并占有重要的地位。在薄膜方面,硬膜、超导膜和亚稳态薄膜的研究将仍然是真空科学方面的热点。真空微电子器件面临的选择则在于能否得到新的构思的支撑。最后对本学科总体的一些问题提出了看法。
This paper reviews the development of vacuum electronic devices in the past 20 years and gives a brief account of some trends in the research and production of thin film and vacuum devices in the next seven years. In the electron beam tube, high definition picture tube, flat display tube, flying point tube, high resolution plasma monitor screen, etc. will continue to develop and occupy an important position. In the area of thin films, the study of hard films, superconducting films, and metastable thin films will remain hot topics in vacuum science. Vacuum microelectronic devices facing the choice lies in whether it can get the new idea of support. Finally, some opinions on the overall problems of this subject are put forward.