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5 N高纯铜具有优异的导电、导热等性能,广泛应用于电子、通讯、国防等工业,研究真空条件下去除微量杂质元素的规律具有重要意义。本文通过真空电子束精炼、真空感应精炼4 N原料铜,研究制备5 N高纯铜过程的真空精炼规律。高纯铜成分检测采用单聚焦辉光放电质谱仪GDMS-VG9000(glow discharge mass spectrometry)。经过研究元素Ag与基体铜的损耗量关系,温度与基体铜蒸发速率的关系,真空度与Ag、As、P和Zn四种杂质元素的杂质浓度关系,杂质总浓度和精炼时间的关系,得出以下研究结果:电子束精炼条件下,根据元素Ag的初始含量(x)和提纯后的含量(y),得到了计算基体铜损耗量的回归方程y Cu=2.9945Ln(x/y)+0.4819,可方便计算基体铜的损耗量(y Cu)。真空感应精炼条件下,得到了温度(T)与基体铜蒸发速率(w)之间的回归方程w=2×10-88×T26.243;随着真空度的提高,铜熔体中饱和蒸气压较高的杂质元素Ag、As、P和Zn的去除率越高,但是幅度逐渐降低;根据实测数据回归了杂质总浓度(Ci)和精炼时间(t)的方程Ci=1.8671t+3.1138。以上研究结果为快速设计真空精炼参数创造了条件。
5 N high-purity copper has excellent conductivity, thermal conductivity and other properties, widely used in electronics, telecommunications, defense and other industries, to study the rules of vacuum to remove traces of impurities is of great significance. In this paper, 4N raw copper was refined by vacuum electron beam refining and vacuum induction to study the vacuum refining process of 5N high purity copper. High-purity copper composition detection using single-focus glow discharge mass spectrometer GDMS-VG9000 (glow discharge mass spectrometry). After studying the relationship between the loss of Ag and matrix copper, the relationship between the temperature and the copper evaporation rate, the relationship between the degree of vacuum and the impurity concentration of four impurity elements Ag, As, P and Zn, the relationship between the total impurity concentration and the refining time, The results are as follows: Under the condition of electron beam refining, the regression equation for calculating the copper loss of the matrix is obtained according to the initial content (x) and the purified content (y) of the element y Cu = 2.9945Ln (x / y) 0.4819, can easily calculate the amount of matrix copper loss (y Cu). Under the condition of vacuum induction refining, the regression equation between the temperature (T) and the evaporation rate of matrix copper (w) was obtained. W = 2 × 10-88 × T26.243. With the increase of vacuum, the saturated steam The higher the impurity elements Ag, As, P and Zn, the higher the removal rate, but the lower the amplitude. The regression equation Ci = 1.8671t + 3.1138 of total impurity concentration (Ci) and refining time (t) The above results provide the conditions for the rapid design of vacuum refining parameters.