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1.引言离子探针近年来已逐步被人们所熟悉,它是在电子探针和双聚焦质谱仪的基础上发展起来的较为新型的仪器。它和电子探针一样,能作微区分析及毫微米的表面分析,又其有双聚焦质谱议的高灵敏度和轻元素的分析(周期表中所有元素)的优点。其特点归纳如下:可以分析所有的固体;样品制备十分简单;检测灵敏度高(可达 ppm—ppb 级);薄表面的分析;深度分析;微区分析。
1. INTRODUCTION Ion probes have gradually become familiar in recent years and are relatively new instruments developed on the basis of electron probe and dual-focusing mass spectrometers. Like electron probes, it performs micro-area analysis and nanometer surface analysis, as well as the advantages of high sensitivity and light element analysis (all elements in the periodic table) of dual-focus mass spectrometry. Its features are summarized as follows: All solids can be analyzed; sample preparation is very simple; detection sensitivity (up to ppm-ppb level); thin surface analysis; depth analysis; micro-area analysis.