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介绍了衍射微透镜阵列的设计原理与制作工艺方法，在此基础上研制出适用于 ３～５ μｍ波长２５６×２５６ ＰｔＳｉ红外焦平面的 ８相位 ２５６×２５６硅衍射微透镜阵列，阵列中微透镜的孔径为 ５０μｍ，透镜 Ｆ数为 ｆ／２．５，微透镜阵列的中心距为 ５０μｍ。实测衍射效率大于 ８０％，能在红外波前传感器中较好应用。
The design principles and manufacturing process of the diffractive microlens array are introduced. Based on this, an 8-phase 256 × 256 silicon diffractive microlens array suitable for 3 ~ 5 μm wavelength 256 × 256 PtSi infrared focal plane is developed. The microlens array A diameter of 50 μm, an F number of lenses of f / 2.5, and a center distance of the microlens array of 50 μm. The measured diffraction efficiency is greater than 80%, which can be better applied in the infrared wavefront sensor.