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文章介绍了激光共聚焦生物芯片扫描仪中高速扫描台二维扫描控制系统位置反馈信号 ,重点分析研究了光栅传感器输出的模拟位移信号的变换和处理。
In this paper, the position feedback signal of two-dimensional scanning control system of laser scanning confocal biochip scanner in high-speed scanning platform is introduced. The transformation and processing of analog displacement signal output by grating sensor are analyzed emphatically.