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提出压电谐振滤波器不能很好地滤除高频谐波的问题,结合一个具体例子理论推导了压电谐振滤波器存在许多干扰谐振频率,从而不能有效滤除一些特定频率的干扰信号.为了解决这个问题,提出一种改进型的静电激励谐振滤波器.为了说明其可行性,具体分析了改进型双端固支微梁静电激励谐振滤波器,理论推导证实基于双端固支微梁的各阶振型正交的原理,通过适当调整激振电容的间距,双端固支微梁的高阶振动模态受到很好的抑制,因此这种谐振滤波器可以有效阻止滤波器中心频率的高频谐波的通过.
In this paper, the piezoelectric resonance filter can not filter the high-frequency harmonics well. The theory of a concrete example is deduced that there are many interfering resonant frequencies in the piezoelectric resonator filter, so that it can not effectively filter out the interference signals of certain frequencies. To solve this problem, an improved electrostatic excitation resonant filter is proposed.In order to demonstrate its feasibility, the improved double-ended fixed-beam micro-beam electrostatic excitation resonant filter is analyzed in detail, and the theoretical deduction proves that the double- The principle of orthogonal mode of each order, by properly adjusting the spacing of excitation capacitors, the high-order vibration modes of the double-ended micro-beams are well restrained, so this resonant filter can effectively prevent the filter center frequency The passage of high-frequency harmonics.