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本文叙述了采用液相外延技术生长的掺Cu_2O铌酸锂光波导片的制备工艺和性能。选用Li_2O-V_2O_5作为助熔剂,测定了薄膜的折射率、X-射线衍射曲线,以及薄膜中的化学成分含量,最后用对称耦合棱镜观察了光波导现象。
This paper describes the preparation process and properties of Cu_2O_2O_ lithium niobate optical waveguide grown by liquid phase epitaxy. The refractive index, the X-ray diffraction curve and the content of chemical components in the film were measured by using Li 2 O-V 2 O 5 as a flux. Finally, the optical waveguide phenomenon was observed by symmetric coupling prism.