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介绍了用小型制冷机冷却的低温泵的抽气原理及基本结构,同时还介绍了低温泵的一些应用。低温泵一般都采用二极G-M循环或改进的索尔维循环制冷机。第一级冷头冷却防护板和冷凝水蒸汽的辐射屏蔽,防止对低温板的热辐射;低温板用第二级冷头冷却,除Ne、H2、He被活性炭吸附外,它可冷凝其余的大部分气体。低温板的抽气速度可用统计方法求出。本文还介绍了典型的低温泵的使用方法。
The principle and basic structure of suction pump of cryogenic pump cooled by small refrigerator are introduced. Some applications of cryogenic pump are also introduced. Cryogenic pumps generally use a diode G-M cycle or an improved Solvay cycle refrigerator. The first stage of the cold head cooling shield and condensation of water vapor radiation shielding to prevent heat radiation on the cryogenic plate; cryogenic plate cooling with a second stage, in addition to Ne, H2, He is activated carbon adsorption, it can condense the rest Most of the gas Cryogenic plate exhaust speed can be calculated using statistical methods. This article also describes the use of a typical cryogenic pump.