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加热体是多晶硅铸锭炉关键的部件之一,为了更好地对加热体进行研究,首先对加热体加热功率进行理论计算。利用Pro/Engineer软件对加热体建立三维模型,将其导入有限元ANSYS Workbench软件。通过热-电耦合单元,计算分析了加热体将电流转换为焦耳热,并通过辐射传递给周围环境的过程,对加热体工作过程中温度的变化及总体焦耳热的结果进行分析研究。计算结果符合加热体使用要求。
The heating body is one of the key components of the polycrystalline silicon ingot furnace. In order to study the heating body better, the heating power of the heating body is calculated theoretically. A three-dimensional model of the heating body was established by Pro / Engineer software and imported into ANSYS Workbench software. Through the thermo-electric coupling unit, the calculation of the heating current conversion to Joule heat, and the transfer of radiation to the surrounding environment through the process of heating the body temperature changes and overall Joule heat results were analyzed. Calculation results meet the heating body requirements.