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扫描电子显微镜二次电子象具有分辨率高、景深大等优点,是三维表面形貌观察的常用模式。但二次电子象是三维图形在垂直于入射电子束平面的投影,因此用单帧图象不能反映出复杂表面的三维信息。用体视学的方法,根据一对相关二维图象中的结构参数可以定量计算出三维几何结构,但对复杂的图象计算费时太多,而且存在定标上的困难。因此,对表面复杂、无规物体的三维图象的定量描述和分析是迫切需要解决的课题。
Scanning electron microscope secondary electron image with high resolution, depth of field and other advantages, is the common observation of three-dimensional surface morphology mode. However, the secondary electron image is the projection of the three-dimensional image perpendicular to the incident electron beam plane. Therefore, the single-frame image can not reflect the three-dimensional information of the complex surface. With stereology, three-dimensional geometric structures can be quantitatively calculated based on the structural parameters of a pair of related two-dimensional images, but it takes too much time to calculate complicated images and there are difficulties in calibration. Therefore, the quantitative description and analysis of three-dimensional images with complex surfaces and random objects are the urgent problems to be solved.