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直流等离子体离子注入是一种新的离子注入手段。本文基于particle-in-cell模型使用MATLAB软件对长轴零件直流等离子体离子注入进行数值仿真研究,主要考察工件到等离子体边界栅网距离、工件半径、工件电势以及离子种类对于离子注入范围和角度的影响。结果表明,工件到栅网的距离对注入结果的影响较大,距离增加导致离子注入相对范围缩小,注入倾斜角度减小。工件尺寸也会影响注入结果,当工件半径较小时,离子注入相对范围较大,注入角度波动也较大;也讨论了离子种类、工件电压不会对离子运动轨迹、注入位置和注入角度造成影响。
DC plasma ion implantation is a new ion implantation method. Based on the particle-in-cell model, MATLAB software is used to simulate the DC plasma ion implantation of long-axis components. The main work focuses on the distance from the workpiece to the plasma boundary, the workpiece radius, the workpiece potential and the ion species. Impact. The results show that the distance between the workpiece and the grid greatly affects the injection result. The increase of the distance leads to the narrowing of the relative range of ion implantation and the decrease of the injection tilt angle. The size of the workpiece also affects the injection result. When the workpiece radius is small, the relative range of ion implantation is relatively large and the injection angle is also greatly fluctuated. The ion species and the workpiece voltage also have no influence on ion trajectory, injection position and injection angle .