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基于法布里-珀罗(F-P)干涉原理,设计制作了具有核磁共振成像(MRI)兼容能力的光纤非本征F-P干涉仪(EFPI)结构的触觉传感器。在整个光纤触觉传感系统中,利用螺旋微控装置对传感器施加力,通过光谱分析(OSA)测量干涉光谱,利用交叉相关解调技术解调出传感器腔长,同时由FS20系列力传感器进行标定。对传感器的性能指标进行了分析,本文传感器的测量范围为0～3N,测量分辨率为0.02nm,多次测量结果显示和理论的吻合度较高。
Based on the Fabry-Perot (F-P) interference principle, a tactile sensor based on an optical fiber extrinsic F-P interferometer (EFPI) with MRI compatibility is designed. In the whole optical fiber tactile sensing system, the force is applied to the sensor by a helix micro-control device, the interference spectrum is measured by spectral analysis (OSA), the sensor cavity length is demodulated by the cross-correlation demodulation technique, and the force is calibrated by the FS20 series force sensor . The performance index of the sensor is analyzed. The measuring range of this sensor is 0 ~ 3N, the measuring resolution is 0.02nm, and the results of multiple measurements show a good agreement with the theory.