大型基板用曝光装置NSR—L1001G

• 作 者: 陈树民
• 出 处: 微细加工技术
• 发表日期: 1990年01期
• 关键词: 曝光装置 基板 L1001G NSR 液晶显示器件 高密度化 印刷电路板 屏面 印刷电路 尼康

日本尼康思公司最近推出了大屏面液晶显示器件或高密度印刷电路基板等图形、复印的大型基板用曝光装置,非常适合大屏面液晶显示器件的批量生产。该装置具有以下主要特点: (1)能实现4μm的高分辨率,适於液晶屏或印刷电路板的高密度化。定位精度在0.8μm以内;

Nikon Corporation of Japan recently introduced a large-screen liquid crystal display device or high-density printed circuit board and other graphics, large-scale photocopying exposure device with a substrate, ideal for large-screen liquid crystal display device mass production. The device has the following main features: (1) to achieve high resolution 4μm, suitable for high-density LCD screen or printed circuit board. Positioning accuracy within 0.8μm;