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为提高晶圆生产线瓶颈区生产率,提出一种瓶颈区并行机半在线调度方法.该方法基于晶圆制造的“多重入”特点,充分利用生产历史信息、可预知信息及实时信息,分析了瓶颈区短期内的重入流来源,给出了瓶颈区任务集的预测方法.针对非零初始状态的生产线,设计了以最小化瓶颈区平均加权拖期时间为优化目标的蚁群优化算法,定义了并行机任务集析取图,并给出了半在线调度方法的应用算例,为实际生产管理提供了可行的优化方法.
In order to improve the productivity of bottleneck area of wafer production line, a semi-online scheduling method of bottleneck area parallel machine is proposed.Based on the “multiple entry” feature of wafer manufacturing, this method makes full use of production history information, predictable information and real-time information, The bottleneck region short-term re-entry flow source, given the bottleneck zone task set prediction method.Aiming at the non-zero initial production line, an ant colony optimization algorithm was designed to minimize the bottleneck region average weighted tardiness time as the optimization objective, The definition of parallel machine task set is analyzed and the application example of semi-online scheduling method is given, which provides a feasible optimization method for actual production management.