论文部分内容阅读
电子隧道传感器应用电子隧道原理对位移进行检测，结构简单，能耗低，它具有很高的灵敏度，并且不受尺寸限制，在微型化和集成化方面显示了良好的前景，各国科学家对电子隧道传感器进行了广泛的研究并制成了加速度计，红外探测器，磁强计，触觉传感器，这些传感器小巧且性能优异。本文介绍了电子隧道原理，对电子隧道传感器的结构和性能进行了描述，并讨论了电子隧道传感器的发展前景。
The electronic tunneling sensor detects the displacement by using the electronic tunneling principle, has the advantages of simple structure and low energy consumption, has high sensitivity and is not subject to the size limitation, and shows good prospect in the miniaturization and integration. The electronic tunneling Sensors have been extensively studied and made into accelerometers, infrared detectors, magnetometers, and tactile sensors that are small and have excellent performance. This paper introduces the principle of electronic tunneling, describes the structure and performance of electronic tunneling sensor, and discusses the development prospect of electronic tunneling sensor.