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本文对XJPD-900磁控溅射生产线的控制系统进行了设计,重点对应用PLC和iFix组态软件实现工艺过程自动控制以及EXCEL表格数据存储等的程序做了设计分析,完成了整机的工艺试验。设备使用证明控制系统界面清晰友善、操作方便,系统稳定可靠、工艺重复性好,达到了设计目的。
In this paper, the control system of the XJPD-900 magnetron sputtering production line was designed, with the focus on the design and analysis of the PLC and iFix configuration software to realize the automatic process control and the EXCEL tabular data storage and so on, and completed the process of the whole machine test. Equipment usage control system clear and friendly interface, easy operation, the system is stable and reliable, process repeatability, to achieve the design purpose.