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分析了投影栅相位法三维轮廓测量系统的非线性误差。建立了几何光学模型,从理论上推导出被测点的相对高度与像点坐标的关系,研究了系统结构参数改变引起的高度误差的变化。详细阐述了像点坐标误差和系统非线性误差对系统精度的影响,并给出了高度误差补偿方法。据此提出修正的非线性高度拟合公式,实验结果证明新拟合公式的优越性。
The nonlinear error of projection grid phase method 3D contour measurement system is analyzed. The geometrical optics model is established. The relationship between the relative height of the measured point and the image point coordinate is deduced theoretically. The variation of the height error caused by the change of the system structural parameters is studied. The effects of image point coordinates error and system nonlinearity error on system accuracy are elaborated in detail, and a method of height error compensation is given. Based on this, a modified non-linear height fitting formula is proposed, and the experimental result proves the superiority of the new fitting formula.