,A Multiple Phase-Shifted Distributed Feedback (DFB) Laser Fabricated by Nanoimprint Lithography

• 作 者: ZUO Qiang ZHAO Jian-Yi CHEN Xin WANG Zhi-Hao SUN Tang-You ZHOU Ning ZHAO Yan-Li
• 机 构: Wuhan National Laboratory for Optoelectronics, School of Optical and Electronic Information, Huazhon
• 出 处: 中国物理快报（英文版）
• 发表日期: 2013年5期

Multiple phase-shifted (MPS) diffraction grating is an effective way proposed to overcome the spatial hole buing (SHB) effect in a distributed feedback (DFB) laser.We present two symmetric λ/8 phase-shifted DFB lasers by using nanoimprint lithography (NIL).The threshold current of a typical laser is less than 15 mA.The side mode suppression ratio (SMSR) is still above 42dB even at 100mA current injection.To show the versatility of NIL,eight different wavelength MPS-DFB lasers on this single chip are also demonstrated.Our results prove that NIL is a promising tool for fabricating high performance complex grating DFB lasers.