论文部分内容阅读
最新实验结果证明:美国国家标准与技术研究院(NIST)几年前研发的技术可以使光学显微镜以纳米级的分辨力测量物体三维形状,远低于光学显微技术正常的分辨力极限(对于绿光大约是250nm)。该成果有望使这项技术成为纳米器件,例如,下一代微芯片制造的有用质量控制工具。NIST实验显示离焦扫描光学显微(TSOM)技术能够探测3-D形状细微差别,揭示直径小于50nm的物体中尺寸小于1nm的变化。2013年NIST的模拟研究显示:TSOM技术理论上可以达到这一点,目前新的测量结果使其在实际中得到证实。
The latest experimental results show that the technology developed by the National Institute of Standards and Technology (NIST) several years ago enables optical microscopy to measure the three-dimensional shape of an object with nanoscale resolution well below the normal resolution limit of optical microscopy Green light is about 250 nm). The result is expected to make the technology a nanodevice, such as a useful quality control tool for the next generation of microchip manufacturing. NIST experiments show that defocused scanning optical microscopy (TSOM) technology can detect subtle differences in 3-D shapes, revealing changes in size less than 1 nm in objects less than 50 nm in diameter. A 2013 NIST simulation study shows that TSOM technology can theoretically achieve this, with new measurements now validating this in practice.