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Transparent TiO2/TiN/TiO2 multi-layer solar control coatings were prepared on normal soda-lime-silica float glass substrate by using d.c. reactive magnetron sputtering at substrate temperature ranging from room temperature to 620℃ . The dependence of optical properties of the coatings and the coating composition, on the substrate temperature was studied. The results of the optical properties show that as the substrate temperature increases, a visible transmittance as high as 65% can be obtained. When the substrate temperature is higher than 370℃ , the infrared reflectance decreases. The results of X-ray photoelectron spectroscopy (XPS) show that when the substrate temperature is higher than 520℃ in oxygen atmosphere, the formation of thin surface over-layers (TiNxOy,) on top of the TiN films can be observed. When the substrate temperature is at 62℃ , the oxynitride become TiO2, which results in the optical degradation of TiN layer in infrared reflectance.
Transparent TiO2 / TiN / TiO2 multi-layer solar control coatings were prepared on normal soda-lime-silica float glass substrate by using dc reactive magnetron sputtering at substrate temperature ranging from room temperature to 620 ° C. The dependence of optical properties of the coatings and the coating composition, on the substrate temperature was studied. The results of the optical properties show that as the substrate temperature increases, a visible transmittance as high as 65% can be obtained. The results of X-ray photoelectron spectroscopy (XPS) show that when the substrate temperature is higher than 520 ° C in oxygen atmosphere, the formation of thin surface over-layers (TiNxOy,) on top of the TiN films can be observed. When the substrate temperature is at 62 ° C., the oxynitride becomes TiO2, which results in the optical degradation of TiN layer in infrared reflectance.