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实现各分块镜间的光学共相位拼接是合成孔径光学系统高分辨率成像的保证。对分块镜间的光学共相位误差的电学检测方法进行了理论分析和实验验证。利用电容测微原理对相邻分块镜间的光学共相位误差实现了测量,测量范围200μm,分辨率5nm。搭建了分块镜光学共相位误差电学检测实验装置,装置中设置了分块镜位置微调机构以实现相互间的光学共相位拼接;用Fisba移相干涉仪对搭建的实验装置的共相位误差检测及拼接结果进行了实验验证,结果表明了将电容测微法用于共相位误差检测的可行性。该方法不仅测量范围大、灵敏度高;且与光学检测方法相比,未增加光学系统的复杂性。
Realizing the optical co-phase splicing among the segmented mirrors is the guarantee of the high resolution imaging of the synthetic aperture optical system. The electrical detection method of the optical co-phase error between the block mirrors is theoretically analyzed and experimentally verified. The principle of capacitance micrometer is used to measure the optical co-phase error between adjacent segment mirrors. The measurement range is 200μm and the resolution is 5nm. Set up an optical splitter optical co-phase error of electrical detection test device, the device is set to fine-tune the mirror position mirror mechanism in order to achieve optical co-phase splicing; Fisba phase shift interferometer on the construction of the experimental device for measuring the phase error And splicing results were verified by experiments, the results show that the capacitance micromethod is used for the feasibility of co-phase error detection. The method not only has a large measurement range and high sensitivity, but also does not increase the complexity of the optical system compared with the optical detection method.