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采用微波等离子体化学气相沉积法制备了(111)面和(100)面金刚石薄膜。测量了金刚石薄膜与液体的接触角、金刚石薄膜表面粗糙度和电阻率。通过扫描电镜、X射线衍射、X射线光电子能谱研究了金刚石薄膜的表面纯度和形貌等对表面能的影响。结果表明:金刚石纯度越高、表面粗糙度越大、晶粒尺寸越小,其表面能越大。经过空气等离子体后处理的金刚石薄膜的纯度和亲水性明显提高。随着在空气中放置时间的增加,亲水性逐渐减弱。在空气中放置相同时间,O2等离子体后处理的金刚石薄膜比H2等离子体后处理的金刚石薄膜亲水性好。
(111) and (100) planes of diamond films were prepared by microwave plasma chemical vapor deposition. The contact angle between diamond film and liquid, the surface roughness of diamond film and the resistivity were measured. The influence of the surface purity and morphology of the diamond film on the surface energy was investigated by scanning electron microscopy, X-ray diffraction and X-ray photoelectron spectroscopy. The results show that the higher the diamond purity, the larger the surface roughness and the smaller the grain size, the larger the surface energy. The purity and hydrophilicity of diamond films after air plasma post treatment have been significantly improved. Hydrophilicity diminishes as the time in air is increased. At the same time in the air, the O2 plasma post-treated diamond film is more hydrophilic than the H2 plasma post-treated diamond film.