论文部分内容阅读
描述了一种在超精密磨削机床上基于误差分离法的非球面表面形状精密测量系统 .首先 ,论述了一般用于平面形状测量的两点法不能直接用于非球面形状测量的原因在于测头的设置误差会引起很大的形状测量误差 .提出了先通过两点法测量平面形状得出机床的运动误差 ,然后对测量非球面形状的另外一个测头的输出进行补偿以得出正确的非球面形状 .用此系统测量了一个直径为 3 0mm的非球面镜头的表面形状 .
An accurate measurement system of aspheric surface shape based on error separation in ultra-precision grinding machine is described.Firstly, the reason why two-point method, which is generally used in plane shape measurement, can not be directly used in aspheric shape measurement, The head set error will cause a great shape measurement error.It is proposed to measure the plane shape by two point method to get the motion error of the machine tool and then compensate the output of the other probe which measures the aspherical shape to get the correct Aspherical shape. With this system, the surface shape of a 30 mm diameter aspherical lens was measured.