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针对传统偏振分束器窄波段、窄角度范围的不足,研制了一种在宽波段宽角度范围内具有180°分光功能的偏振分束器/耦合器。该器件基于线栅偏振器和亚波长光栅结构原理设计,利用半导体工艺的刻蚀技术制作。利用一维金属线栅对入射电磁波的偏振响应和亚波长光栅仅存在零级衍射的特性,实现了较宽的通带宽度与可接受角度范围、极大的分光角度、高消光比和低插入损耗。实验测得透射、反射消光比均大于20 dB,插入损耗小于0.5dB。通过自行搭建的微结构测试平台,测量了p、s光的透射率、反射率随入射角度变化的曲线,和严格耦合波理论模拟结果符合。深入分析了制作中的过刻蚀对性能产生的影响。
Aiming at the shortcomings of the narrow band and the narrow angle range of the traditional polarization beam splitter, a polarization beam splitter / coupler with 180 ° beamsplitting function in wide range of wide angle is developed. The device is designed based on the structure principle of wire grid polarizer and sub-wavelength grating, and is fabricated by etching technology of semiconductor process. The polarization response of incident electromagnetic wave and the existence of zero-order diffraction of sub-wavelength grating are realized by the one-dimensional metal wire grid. The wide passband width and the acceptable angle range are achieved. The great spectral angle, high extinction ratio and low insertion loss. The measured transmission and reflection extinction ratio are both greater than 20 dB and the insertion loss is less than 0.5 dB. Through the microstructure test platform constructed by ourselves, the transmittance of p and s light and the curve of reflectivity with incident angle were measured, which were in good agreement with the simulation results of rigorous coupled wave theory. In-depth analysis of the production of over etching on the performance impact.