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本文叙述了半导体应变片的原理和特性,介绍了半导体应变片式加速度传感器和压力传感器,还详细介绍了半导体应变片式传感器的温度补偿原理和方法,以便读者合理使用半导体应变片式传感器。
This paper describes the principle and characteristics of semiconductor strain gauges, introduces semiconductor strain gauge accelerometer and pressure sensor, and introduces the principle and method of temperature compensation of semiconductor strain gauge sensor in detail so that readers can use semiconductor strain gauge sensor reasonably.