离子源用的长寿命阴极

• 作 者: 申涛
• 机 构: 长沙半导体工艺设备研究所
• 出 处: 微细加工技术
• 发表日期: 1985年04期
• 关键词: 离子源 阴极 电离效率 离子注入机 散角 束流 对阴极 散度 钨丝 寿命

气固双等离子源具有电离效率高,引出束流大,能散度小、散角小,亮度高等优点。因此,能成功的用于中能离子注入机上。但是,由于用钨丝作为阴极发射材料,其寿命很短,多则几十小时,少则只有几小时,给工作带来不便。我们在离子源原有的基础上,对阴极进行多次的改正实验,采用LaB_6作发射材料后,使阴极的寿命大大提高了,而且离子源工作起来稳定性好,阴极工作时间累计可达300小时以上。

The gas-solid dual plasma source has the advantages of high ionization efficiency, large outgoing beam current, small divergence, small angle of divergence and high brightness. Therefore, it can be successfully used on the ion implanter. However, since tungsten filament is used as a cathode emitting material, its life span is very short, ranging from tens of hours to as little as a few hours, which brings inconvenience to work. Based on the original ion source, we conducted many experiments on the cathode. After LaB_6 was used as the emitter material, the lifetime of the cathode was greatly improved, and the stability of the ion source was good. The total working time of the cathode reached 300 Hours or more.