薄膜工艺的动向

• 作 者: 忻华泰
• 出 处: 激光与光电子学进展
• 发表日期: 1988年01期
• 关键词: 膜工艺 电子产品 材料利用率 计算技术 应用领域 代用品 反馈性 降低成本 工艺过程 电容器

在电子产品的制造和应用领域里,小型化与降低成本有着密切的联系。下列几点在此起着重要作用:——减少材料用量,提高材料利用率,为贵重和贮量有限的材料和原料寻找代用品,改善材料的经济效益;——通过自动化降低加工成本;——提高产品的产量和可靠性,为此在工艺过程中(不只是在结束时)利用计算技术分析处理以及反馈性程序控制进行检测显得越来越重要;——减少企业功耗(节能);

In the field of electronic product manufacturing and application, miniaturization is closely linked with cost reduction. The following points play an important role here: - Reduce material usage, improve material utilization, find substitutes for materials and raw materials that are precious and of limited reserves, and improve the economic benefits of materials; - Reduce processing costs through automation; - It is increasingly important to increase the yield and reliability of the product by using computational analysis and feedback control in the process (not just at the end); - To reduce the power consumption of an enterprise (energy saving);