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考虑了原子在发生层间扩散过程中Ehrlich-Schwoebel势垒的作用,构造了四边形基底表面上薄膜三维生长的动力学Monte Carlo(MC)模型。在这个模型中,原子表面运动的三种动力学过程包括沉积、扩散和脱附过程,它们相互影响又相互独立,依据各自的概率发生。在不同生长条件下,模拟出薄膜的三种生长模式以及相应的薄膜三维生长形貌图。对计算结果的分析表明,ES势垒和在ES势垒作用下基底温度和沉积速率等因素对薄膜的三维生长模式有重要影响。
Considering the role of Ehrlich-Schwoebel barrier during interlayer diffusion, the kinetic Monte Carlo (MC) model of three-dimensional film growth on a quadrilateral substrate surface was constructed. In this model, three kinetic processes of atomic surface movement include sedimentation, diffusion and desorption processes, which interact with each other and are independent of each other, according to their respective probabilities. Under different growth conditions, three growth modes of the film and corresponding three-dimensional growth patterns of the film were simulated. The calculation results show that the ES barrier and the substrate temperature and deposition rate under ES barrier have an important influence on the three-dimensional growth mode of the film.