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提出了一种以生产率、剂量精度与激光器使用成本三者最佳匹配为优化目标的步进扫描投影光刻机剂量控制参量优化新算法及其数学模型,通过将激光器重复频率作为可调参量并引入有效脉冲个数的概念,获得了有效剂量区间内任意给定剂量所应采取的优化策略并给出了剂量控制参量的具体计算方法。理论推导和模拟计算结果表明,新算法既保持了原算法在生产率和剂量精度优化方面的优势,又改进了原算法在激光器成本优化目标上的缺陷。随着准分子激光器及其剂量控制技术的进一步发展,新算法可望更能显示出其优越性并具有更广阔的应用前景。
A new algorithm and mathematical model for dose control parameters optimization of stepping scanning projection lithography machine based on the best matching of the productivity, dose accuracy and laser cost are proposed. By using the laser repetition frequency as an adjustable parameter By introducing the concept of effective pulse number, the optimization strategy to be taken for any given dose in the effective dose interval and the specific calculation method of dose control parameters are given. Theoretical derivation and simulation results show that the new algorithm not only retains the advantages of the original algorithm in the optimization of productivity and dose accuracy, but also improves the defect of the original algorithm in laser cost optimization. With the further development of excimer laser and its dose control technology, the new algorithm is expected to show its superiority and has a broader application prospect.