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本文介绍了单层胶剥离工艺在制作小面积超导隧道结中的应用。采用该技术,用一般国产设备和光刻胶.制作出结面积为4×4μm~2的五结和十结串联结阵,文中分别给出I—V特性的测试结果。
This article describes the application of single-layer adhesive stripping process in the manufacture of small area superconducting tunnel junction. Using this technique, we fabricated the five-junction and ten-junction cascades with the area of 4 × 4μm ~ 2 by using domestic equipment and photoresist. The test results of I-V characteristics are given respectively.