XPS study of BZT thin film deposited on Pt/Ti/SiO2/Si substrate by pulsed laser deposition

• 作 者: 蒋艳平 唐新桂 刘秋香 程铁栋 周益舂
• 机 构: SchoolofPhysics＆OptoelectricEngineering,KeyLaboratoryofLowDimensionalMaterialsandApplicationTechnolo
• 出 处: 中国有色金属学会会刊：英文版
• 发表日期: 2007年A02期
• 关键词: BZT薄膜 脉冲激光沉积 化学状态 铂/钛/二氧化硅/硅基底 chemical state XPS BZT thin film pulsed laser
• 基金项目: Project（05001825） supported by Guangdong Provincial Natural Science Foundation of China, project（KF0707） supported by the OpeningProject Program of Key Laboratory of Low Dimensional Materials and Appl

Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surface morphology of the thin film were stu