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本文基于修正的二维泊松方程导出了适用于深亚微米MOSFET的阈值电压解析模型,并进而通过反型区电荷统一表达式并考虑到载流子速度饱和、DIBL、相关迁移率、反型层电容和沟道长度调制等主要小尺寸与高场效应,最后得到了较为准确、连续和可缩小的漏极电流模型.模型输出与华晶等样品测试MINIMOS模拟结果较为吻合,可用于VLSI器件与电路预测模拟
Based on the modified two-dimensional Poisson’s equation, this paper derives a threshold voltage analytical model suitable for deep sub-micron MOSFETs, and then through the unified expression of charge in the inversion region and taking into account the saturation of carrier velocity, DIBL, related mobility, Layer capacitance and channel length modulation and other major small size and high field effect, and finally get a more accurate, continuous and can reduce the drain current model.The output of the model and the Huajing sample test MINIMOS simulation results are in good agreement can be used for VLSI devices And circuit prediction simulation