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TiO2 nanometer thin films with photocatalytic antibacterial activity were prepared by the sol-gelmethod on fused quartz and soda lime glass precoated with a SiO2 layer. The thin films were characterized by X-ray photoelectron spectroscopy ( XPS ), scanning electron microscopy (SEM), and X- ray diffraction ( XRD ). Theresults show that sodium and calcium diffusion into nascent TiO2 film is effectively retarded by the SiO2 layer pre-coated on the soda lime glass. The antibacterial activity of the films was determined. The crystalline of TiO2 nano-meter thin film has important effects on the antibacterial activity of the film.