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介绍氢气回收纯化系统在多晶硅行业方面的应用,以及突出氢气回收纯化系统的工作原理,工艺特点,多晶硅行业产能分析及其意义。
This paper introduces the application of hydrogen recovery and purification system in polysilicon industry, as well as highlights the working principle, process characteristics, capacity analysis of polysilicon industry and its significance.