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光电子谱仪是用来研究光子从材料中打出的电子能量分布、角度分布和强度的一种表面分析仪器。光电子谱仪中应用的激发源一般为 x 射线源和真空紫外光源两种。用 x 射线源的叫 x光电子谱(XPS);用紫外源的叫紫外光电子谱(UPS)。前者也叫化学分析电子谱(ESCA),多数情况下 UPS 是 XPS 的副机,所以,有时 ESCA 又是二者的总称。XPS 和 UPS 可以检测表面的元素组份,灵敏度高(0.01分子层),信息深度小于30
Photoelectron spectroscopy is a surface analysis instrument used to study the electron energy distribution, angular distribution and intensity of photons emitted from a material. The excitation source used in photoelectron spectrometer is generally two kinds of x-ray source and vacuum ultraviolet light source. X-ray source called x-ray photoelectron spectroscopy (XPS); UV source called UV photoelectron spectroscopy (UPS). The former is also called Chemical Analysis Electron Spectroscopy (ESCA). In most cases, the UPS is an accessory of the XPS. Therefore, ESCA is sometimes referred to as both. XPS and UPS can detect the surface elemental composition, high sensitivity (0.01 molecular layer), the depth of information is less than 30