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利用计算机计算薄膜在反射率极值法监控的镀膜系统上淀积时监控片反射率的实时变化并模拟薄膜的实际淀积过程 ,得出设计膜系在一定制备工艺条件下所获得成膜的膜系结构 ,根据模拟结果计算的光学特性曲线与实际淀积出的成膜实测值相吻合
The real-time changes of the reflectance of the control chip during deposition of the film on the coating system monitored by the extremum of reflectance were calculated by a computer, and the actual deposition process of the film was simulated. The obtained film was obtained under certain preparation conditions Film structure, calculated according to the simulation results of the optical characteristics of the curve and actually deposited film measured values ?? coincide