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为了研究沉积时间和衬底温度对类金刚石薄膜的影响,在用脉冲激光沉积法在Al2O3衬底上制备类金刚石薄膜的实验中,保持其他实验参数不变,先取沉积时间分别为15 min和40 min来沉积薄膜;再取衬底温度分别30℃和300℃来沉积薄膜。用显微镜观察薄膜是否有起皱现象,用Raman光谱仪检测薄膜的微观结构,用原子力显微镜检测薄膜的表面形貌。结果表明:薄膜中存在一些石墨颗粒。沉积时间和衬底温度对薄膜的黏附性和微观结构均有显著影响——延长沉积时间或升高衬底温度都将导致薄膜内的残余应力增加和薄膜起皱。缩短沉积时间或升高衬底温度都将导致薄膜中的sp3/sp2比值减小、非晶态的sp2键向石墨晶相转化、石墨晶粒数量增多,体积增大。最后,根据脉冲激光沉积类金刚石薄膜的机理对实验现象进行了分析。
In order to study the influence of deposition time and substrate temperature on diamond-like carbon (DLC) films, other experimental parameters were kept unchanged in the experiment of preparing diamond-like carbon films on Al2O3 by pulsed laser deposition. The deposition time was 15 min and 40 min to deposit the thin film; and then take the substrate temperature respectively 30 ℃ and 300 ℃ to deposit the thin film. The microstructure of the film was observed by microscope. The microstructure of the film was observed by Raman spectroscopy. The surface morphology of the film was observed by atomic force microscopy. The results show that there are some graphite particles in the film. Both deposition time and substrate temperature have a significant effect on the adhesion and microstructure of the films - either extended deposition time or elevated substrate temperature will result in increased residual stresses in the film and wrinkling of the film. Decreasing the deposition time or increasing the substrate temperature will cause the sp3 / sp2 ratio in the film to decrease, the amorphous sp2 bond to the graphite crystal phase transformation, the number of graphite grains increases, the volume increases. Finally, the experimental phenomena were analyzed according to the mechanism of pulsed laser deposition of diamond-like carbon films.