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恒弹性合金因其在一定温度范围内弹性模量几乎不随温度变化的特点,在精密仪器仪表等制造领域应用越来越广泛,其表面加工的要求也越来越高。为研究飞秒激光在不同加工环境下对恒弹性合金的烧蚀情况,对比了两种加工条件不同的烧蚀实验。空气环境中;用150μm薄玻璃片压贴在样品表面,烧蚀方式分为定点烧蚀和刻槽两种,用共聚焦显微镜和扫描电镜测量了烧蚀后的恒弹合金形貌。结果表明,采用定点烧蚀的加工方式时,相同激光参数下,空气中烧蚀坑的直径最小,深度最大;玻璃片约束下的坑的直径最大,深度最小,当激光能量为50μJ,脉冲数为100个时,该约束下烧蚀坑的深度缩减量可达44.0%。采用刻槽的加工方式时,在空气中的槽的深度大,宽度较大,在玻璃片的约束下,加工的槽的深度和宽度都减小,当激光能量为50μJ、扫描速度为1.5mm/s时,其深度缩减量可达47.2%。
Constant elastic alloy because of its temperature in the range of almost no change in temperature with the characteristics of temperature, precision instrumentation and other manufacturing applications more widely, the surface processing requirements are getting higher and higher. In order to study the ablation of femtosecond laser on constant elastic alloy in different processing environments, two different ablation experiments were compared. Air environment; 150μm thin glass plate pressed on the surface of the sample, the ablation method is divided into fixed-point ablation and notch two kinds of confocal microscopy and scanning electron microscopy were measured after ablation of the constant-alloy morphology. The results show that under the same laser parameters, the diameter of the ablation pit in the air is the smallest and the depth is the largest under the same laser parameters. The diameter of the pit under the glass constraint is the largest and the depth is the smallest. When the laser energy is 50μJ, For 100, the depth of the ablation pit can be reduced by 44.0% under this constraint. The use of groove processing, the depth of the groove in the air, a large width, under the constraints of the glass, the processing of the groove depth and width are reduced, when the laser energy is 50μJ, the scanning speed of 1.5mm / s, its depth reduction can reach 47.2%.