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用化学湿法腐蚀的方法制作了SOI光波导 ,并且用三维波束传播方法分析和设计了单模波导和 1× 2 3dB多模干涉分束器 ,修正了有效折射率和导模传输方法的误差 .制作的器件具有低传输损耗 (- 1 37dB/cm)、低附加损耗 (- 2 2dB)、良好的均衡性 (0 3dB)等优良性能 .
The SOI optical waveguide was fabricated by a chemical wet etching method. The single-mode waveguide and the 1 × 2 3dB multi-mode interference beam splitter were analyzed and designed by the three-dimensional beam propagation method. The errors of effective refractive index and guided mode transmission were corrected The fabricated device has excellent performance of low transmission loss (-137dB / cm), low additional loss (-222dB), well balanced (0 3dB) and so on.