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将启发式方法作为技术范式的特征指示,以启发式方法的不连续性和稳定性为切入点,基于专利引证网络分析半导体制造领域技术范式和技术轨迹的发展和演化过程。从美国专利数据库中采集55 229项1976年至2006年授权的半导体制造领域的相关专利,从专利数据集NBER中查询得到专利引证关系,利用网络分析软件Pajek构建专利引证网络。应用搜索路径连接统计法和搜索路径节点对统计法计算专利引证路径的连接度,提取技术进化轨迹。以技术进化分叉为切入点,从技术进化轨迹连续性和稳定性的角度对半导体制造技术各个发展阶段进行界定。分析各个发展阶段中专利的适用范围、技术背景、解决方案等,从中提炼技术启发式方法,进而分析技术范式及其演化情况。最后对下一步的研究工作进行展望。
Taking the heuristic method as the characteristic indicator of the technical paradigm, taking the discontinuity and stability of the heuristic method as the starting point, the patent citation network is used to analyze the development and evolution of the technical paradigm and technological trajectory in the field of semiconductor manufacturing. A total of 55 229 patents related to semiconductor manufacturing authorized from 1976 to 2006 were collected from the United States Patent Database. Patent citations were obtained from the patent data collection NBER, and a patent citation network was constructed using the network analysis software Pajek. Applying the search path to connect the statistical method and the search path node to the statistical method to calculate the degree of connection of the patent citation path and extract the technological evolution trajectory. With the bifurcation of technological evolution as the starting point, the various stages of semiconductor manufacturing technology are defined from the perspective of the continuity and stability of technological evolution. Analyze the application scope, technical background, solution and so on of the patent in each stage of development, extract the technical heuristic method, and then analyze the technical paradigm and its evolution. Finally, the future research work is prospected.