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超光滑表面反射镜是激光陀螺中的关键器件，镜片的粗糙度引起的散射光直接影响陀螺的闭锁阈值，因而研究超光滑表面的加工和检测有着重要的应用价值。本文比较了超光滑表面的各种测试方法，提出了一种微分散射测量方法，用光子计数器作微弱散射光的接收器，测量散射平面内—90°～90°范围内的散射光强度分布，光子计数器的探测范围在10－11～10－16W，微分散射测量系统的测量重复精度为±10％。
Ultra-smooth surface mirrors are the key components in the laser gyroscope. The scattered light caused by the roughness of the lens directly affects the latching threshold of the gyroscope. Therefore, it is of great value to study the processing and testing of ultra-smooth surfaces. In this paper, various testing methods for ultra-smooth surfaces are compared. A differential scattering measurement method is proposed. The photon counter is used as the receiver of weakly scattered light to measure the scattered light intensity distribution in the scattering plane from -90 ° to 90 °. Photon counter detection range of 10-11 ~ 10-16W, differential scattering measurement system measurement repeatability of ± 10%.