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本文介绍用国产E-105型离子交换薄膜富集稀土元素新方法制成的稀土薄膜标样,以及在LT-1和IMS-300型离子探针上进行了稀土二次离子相对溅射产率的测量,其平均标准偏差不大于20%。
In this paper, rare earth thin films prepared by a new method of enriching rare earth elements with domestic E-105 ion-exchange membrane are introduced, and the relative sputtering yields of rare earth secondary ions on LT-1 and IMS-300 ion probes Of the measurement, the average standard deviation of not more than 20%.